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Equipment 공정기술 포토공정 
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Resolution
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1.5nm @ 20kV @ WD = 2mm (1.0nm with auto levelling system) 1.7nm @ 15kV @ WD = 2mm (1.3nm with auto levelling system) 1.9nm @ 10kV @ WD = 2mm (1.5nm with auto levelling system) 2.5nm @ 1kV @ WD = 2mm (2.1nm with auto levelling system) 5.8nm @ 200V @ WD = 2mm (5.0nm with auto levelling system) |
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Acceleration Voltage
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Range: 0.1kV to 30kV.
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Adjustment: Continuously variable in 10 volt steps.
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Probe Current
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Range: 4pA to 10nA, 20nA optional.
Stability: Better than 0.2%/h.
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Magnification
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Range: 20x to 900kx.
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Adjustment: Continuously variable in either coarse or fine modes.
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Pre-sets: Selectable from a user definable table.
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Auto-Compensation: Magnification is precisely corrected automatically for changes in working distance or acceleration voltage.
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Calibration: Display magnification precisely corrected for changes in hard copy output device.
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【 직접사용 대상 목록 】
| 기관명 | 부서(학과명) | 연구책임자 | 성명 |
