u Application
l High resolution 3D surface measurement.
l Non-contact 3D surface profile measurements
l Roughness Measurement.
u Equipment Performance
l Objectives : 5x, 10x and 50x ESD Compliant
l Field-of-View Lenses : 0.5x, 1x and 2x
l Vertical Measurement Range : 0.1nm to 1mm
l Vertical Resolution : 1A Ra
l RMS Repeatability : 0.01nm
l Vertical Scan Speed : up to 7.2um/sec
l Lateral Spatial Sampling : 0.08um to 3.36um
l Field-of-View
: From 2.47mm x 1.88mm to 60um x 50um
【 직접사용 대상 목록 】
Equipment 
