나노융합기술원

- Technology 공정기술 특화기술
- PSS (Patterned Sapphire Substrate) 제작기술
- I-Line Stepper / Wet Station_SPM / Dry Etcher_ICP / CD-SEM / HR FE-SEM (in Clean Room) / 3D Profiler장비를 활용한 PSS (Patterned Sapphire Substrate) 제작기술
- 연관장비
  
  I-Line Stepper - 1
  
  Dry Etcher_ICP
  
  Wet Station_SPM
  
  CD-SEM
  
  3D Profiler
  
  HR FE-SEM (in Clean ...