신규 도입장비 서비스 개시

FE-SEM 7800F Prime(High Resolution FE-SEM - II (Dual EDS))

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Dual EDS 기능 / 빠른스켄 / 정확한 분석 능력

 • Resolution
  - 0.7nm guaranteed or better (at 15kV, GB mode)
  - 1.2nm guaranteed or better (at 1kV, GB mode)
  - 0.7nm guaranteed or better (at 1kV, GBSH mode)
  - 3.0nm guaranteed or better (at 5kV, 5nA, WD10mm)

 • Image mode
  - Secondary-electron image
  - Backscattered-electron image
  - SE + BSE mixed image

 • EDS System
  - 64bit Micro-analytical Processor
  - LN2 Free Silicon Drift Detector, 150mm2 or larger
  - Twin EDS Detector System
  - Energy resolution : ≤127eV at 20,000cps, (Mn Ka) or better
  - Cobalt Standard sample

☎ 장비담당자 : 최찬호 연구원 (054-279-0225)​