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NINT Information System
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장비관리
| 장비 정보등록
장비정보
분류
NCNT
NNCI
메인장비
:: 메인장비 ::
E-Beam Lithography System - 1
123
E-Beam Lithography System - 2
Laser Lithography System
I-Line Stepper - 1
PR Track_TEL - 1
UV-IL System
PR Track_DAVID
Photo Base System
PR Spin Coater_Sawatec
Rinse and Dryer
Developer
Pt coater
Wet Station_Ebeam
Atomic Layer Deposition (ALD)
UHV-CVD
Sputter_SNTEC
Sputter_ENDURA - 1
AP-CVD
LP-CVD System
LP-CVD
Furnace Metal Anneal
setes
stest
High Resolution FE-SEM-Ⅱ (JSM 7800F PRIME with Dual EDS)
PE-CVD - 2
Wafer Bonder
stest
sadas
PE-CVD - 1
Sputter_ENDURA - 2
PE-CVD - P5000
Dry Etcher_ICP
Dry Etcher_DMS
Dry Etcher_Oxide
Dry Etcher_Poly Si
PR Asher_Fusion
PR Asher_FEOL - 1
Dry Etcher_Metal
Wet Station_Acid System
Wet Station_Acid - 1
Spin Rinse Dryer
Wet Station_Pre Clean-I
Wet Station_SPM
Wet Station_Pre Clean
Furnace_Low T Anneal
Furnace_N+ Dopant Anneal
Furnace_Poly Si - 1
Furnace_High T Anneal-1
Furnace_Dry Oxidation-1
Furnace_Pyro Oxidation System
Furnace_TEL - 1
Wet Station_Acid - 2
RTP for RTO
RTP for Silicide
High Current Implanter
Medium Current Implanter
CD-SEM
Process Monitoring System
Thickness Measurement_OP3260
EUV Aerial Image Microscope (AIMS)
EUV Reflectometry
Cryogenic RF Measurement System
Flicker Noise Measurement System
FT-IR
CNT Synthesis System
Nanocrystal-Synthesis System
Mask Aligner_MA6
NEMS Base System
E-Beam Evaporator - 1
Sample Preparation System 1
PZT Coater
Deep Reactive Ion Etcher(DRIE) - 1
PZT Etcher
Spin Coater with Glove Box
Mask Aligner_MA8
Display Photo Base System
Ink Jet Printing System
OMBD_Metal Evaporation System
OLED Systems
PECVD System
Probe Station_Power Semiconductor
Surface Potential Measurement System
High Resolution FE-SEM-I (JSM 7401F)
Furnace Activator_SiC 200
Raman Spectroscopy(Alpha 300 R)
MBL KIT - Science Experimental Devices
High Resolution FE-SEM-Ⅲ (HITACHI S-4800)
3D Printer(Core200)-1
3D Printer(Core200)-2
Focused Ion Beam -Ⅳ(SMI 3050) / FIB-Ⅳ
Focused Ion Beam -Ⅰ(Helios 600 with TKD) / FIB -Ⅰ
HR-[S]TEM-Ⅰ(2100F with Probe Cs-Corrector)
HR-(S)TEM -2200FS with Image Cs-corrector
3 Dimensional Atom Probe
Atomic Force Microscope-Ⅰ(D 3100) / AFM-Ⅰ
Multi-mode STM_AFM
Secondary Ion Mass Spectrometry (SIMS)
Magnetic Property Measurement System (MPMS)
Low Temp Probe Station (LTPS)
Variable Temperature Insert
Sample Preparation System
Spectroscopic Ellipsometer
4 Point Probe - 1
3D Profiler
Stress Measurement System
High Resolution Powder-XRD
Rs Measurement System
Noise Parameter Test System
Virtuoso Noise Pro
Vector Signal Analyzer 외 2
Logic Analyzer
PR Asher_NEMS
Pico Indenter
Cutting/Grinding/Polishing System
Curve Tracer with Probe Station (in Clean Room)
Gentle Mill
Ion Beam Thinner
Carbon Coater
Sputter (OLED)
HR FE-SEM (in Clean Room)
Deep Reactive Ion Etcher(DRIE) - 2
Wet Station_Acid - 3
MEMS Spin Coater
Semiconductor technical support service (Principal Researcher)
Semiconductor technical support service (Researcher)
I-Line Stepper - 2
I-Line Stepper - 3
PR Track_TEL - 2
PR Asher_FEOL - 2
Furnace_Poly Si - 2
Furnace_High T Anneal-2
Furnace_High T Anneal-Ⅲ
Furnace_Dry Oxidation-2
Furnace_TEL - 2
Optical Microscopes - Photo
Optical Microscopes - Etch
Optical Microscopes - THinFilm
Optical Microscopes-Diffusion
Optical Microscopes-EBL
Physical Analysis Technical Support Services (Senior Researcher)
Physical Analysis Technical Support Services (Principal Researcher)
Semiconductor technical support service (Senior Researcher)
SPM System (GUMI Center)
Metal Sputter (ME)
Mask Aligner (ME)
Parylene Coater (ME)
Spray coater (ME)
NEMS Base System (Spin Coater - 1)
NEMS Base System (Spin Coater-2)
NEMS White Wet station - Acid
NEMS White Wet station - Organic
MEMS Yellow Wet station
NEMS Yellow Wet station - Organic
NEMS Base System (optical microscope)
Alpha-Step (ME)
Focused Ion Beam -Ⅱ(Helios 650 with EBSD) / FIB -Ⅱ
UV/Vis/nIR Spectrometer
High Resolution FE-SEM-Ⅳ (JSM-IT710HR)
APLT SPEED-200iD
LPCVD Furnace
Furnace High Temp anneal_SiC
3D Conforcal Scanning Microscope (3DCSM)
3D Atom Probe Tomography (LEAP4000X HR)
E-beam Evaporator - 2
Furnace Oxidation_LEAD
ㄹㅇㄴㄹ
PR Asher_BEOL
Dry-Etcher_Ulvac
I-Line Stepper - 4
PR Track_SVS - 1
PR Track_SVS - 2
PR Track_SVS - 3
PE-CVD - IV
Dicing Saw
Metal Lift-Off
Sorter
Uprint 3D Printer (기업지원)
3D Printer(Replicator 2X)-1
3D Printer(Replicator 2X)-2
3D Printer(Replicator 2X)-3
3D Printer(Makerbot R2)-Ⅹ (ABS filament)
3D Printer(Replicator 2X)-4
3D Printer(Replicator 2X)-5
3D Printer(Makerbot R2)-Ⅲ (PLA filament)
3D Printer(Makerbot R2)-Ⅳ (PLA filament)
3D Printer(Replicator 2X)-6
3D Printer(Makerbot R2)-Ⅵ (PLA filament)
3D Scanner Handheld
Solidworks
DSLR Camera
Helicam
Laser Cutter(MYL-0906)
3D Printer filament equipment
Fluorescence Microscope (GUMI Center)
Fluorescence Microscope (GUMI Center)
Furnace_Dry Oxidation -Ⅲ
5
Physical Analysis technical support service (Researcher)
물리분석장비 Test (관리자 테스트)
Dry Etcher - TEL
창의과학 Test
Focused Ion Beam -Ⅲ(Helios G3 CX) / FIB-Ⅲ
Maskless laser lithography system
3D Printer(Core200)-3
3D Printer(Core200)-4
3D Printer(Core200)-5
3D Printer(Core200)-6
3D Printer(Core200)-7
3D Printer(Core200)-8
3D Printer(Core200)-9
3D Printer(Core200)-10
Laser Cutter(MT-1060)
3D Scanner(Sense2)-1
3D Scanner(Sense2)-2
DC&RF Sputtering system
PECVD System P-5000
PZT sputtering
CD&Surface inspection system
Wafer Laser Marker
CD Surface Inspection System
Multimedia-Imaging Microscope
Atomic Force Microscope-Ⅱ(Jupiter XR) / AFM-Ⅱ
NINT Semiconductor Education Platform
E-Beam Lithography System - 1 (Edu)
Atomic Layer Deposition (ALD) (Edu)
AP-CVD (Edu)
Furnace Metal Anneal (Edu)
Spin Rinse Dryer (Edu)
Furnace_TEL - 1 (Edu)
4 Point Probe - 1 (Edu)
HR FE-SEM (in Clean Room) (Edu)
Mask Aligner_MA6 (Edu)
NEMS White Wet station - Acid (Edu)
NEMS White Wet station - Organic (Edu)
E-Beam Evaporator - 1 (Edu)
Deep Reactive Ion Etcher(DRIE) - 1 (Edu)
1111111
1111
Silvaco TCAD Simulation
그룹
공정기술팀 그룹
물리분석팀 그룹
교육홍보팀 그룹
기자재관리번호
장비명 (국문)
장비명 (영문)
제조사
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시간
15분
30분
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:: 장비 담당자 ::
관리자
김병수
백경흠
박현진
강민재
백성기
최소윤
김성규
이재호
신훈규
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이남걸
안정미
조은경
김인철
이남석
김정훈
김동은
이정익
이현규
최경근
손규현
한성웅
강민식
황현주
김윤경
123
12312
12312
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신민호
박영재
한은영
김주희(청구담당)
박민지
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이수연
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김태완
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이주환
정채은
이예정
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김우리
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변창주
신혜연
최정원
유현기
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이원범
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